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Qualification of media supply components

 
: Warnecke, H.-J.; Dorner, J.

Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.:
Ultra Clean Technology. STEP Europe Conference
London; Mountain View, 1990
S.57-69
Step Europe Conference <1990, Brüssel>
Englisch
Konferenzbeitrag
Fraunhofer IPA ()
gas; gas-Partikelzähler; measurement; particle measurement; Prüfung; Teilchen

Abstract
This paper shows the necessity of standardized measuring and test methods for the qualification of media supply components and the procedure for their development. The simple and practicable method is presented based on the example of a guideline proposal for particle measurements at ultrapure gas valves.

: http://publica.fraunhofer.de/dokumente/PX-30324.html