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Pure materials for media supply

: Dorner, J.

Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.:
Defect Control and Related Yield Management. Defects and impurities in materials, in process defect genetation, yield management, advanced testing methodologies
London, 1991
Semicon Europa <1991, Zürich>
Fraunhofer IPA ()
Fertigung; Halbleiter; Halbleiterfertigung; Höchstrein; Ultrapure media supply

The requirements for the chemical and particulate cleanliness of process media in the area of semiconductor manufacturing will increase more and more in the future. Due to that fact elements around the media such as containers, pumps, valves, tubes and filters are of growing influence on the quality of the process fluid. This lecture will give a universal overall picture as well as attempts for future provision of even cleaner "hardware" for ultrapure media supply. This field stretches from the manufacturing of the materials (synthetic material or stainless steel) over the finishing process to isntallation in a supply system. It is the user who will more severely call for proof of quality in the future. For that reason everyone involved in the manufacturing process (starting from the manufacturing of materials until the assembly of the whole supply system) mudz fulfil his task with full responsibility.