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Preparation, properties and structure of metal containing amorphous hydrogenated carbon films

: Grischke, M.; Bewilogua, K.; Dimigen, H.


Materials and manufacturing processes 8 (1993), S.407-417
ISSN: 1042-6914
Fraunhofer IST ()
a-C-H; adhesion; amorphous hydrogenated carbon film; application; coating; DC magnetron sputtering; friction coefficient; hardness; Me-C-H; mechanical property; metal containing a-C-H film; rf-diode sputtering; stress; structure; wear resistance

Amorphous hydrogenated carbon (a-C:H) films and hydrocarbon films containing transition metals (Me- C:H) were prepared by glow discharge and reactive sputtering techniques at relatively low substrate temperatures (100 - 200 degree C). The tribological properties of these both types of coating materials will be compared. The Me-C:H films show very low friction coefficients (0.15 equal or bigger than My equal or bigger than 0.05), depending on the used metal as well as on the metal content. Up to now measurements of microhardness and elastic modulus could not reveal a comprehensive understanding of the excellent tribological properties of the Me-C:H films. The experimental results of different analytical investigations can be explained by a structure model consisting of a homogeneous mixture of amorphous carbon (a-C:H) and metal carbides.