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Preparation and characterization of cubic boron nitride and carbon nitride films

: Bewilogua, K.

Le vide 52 (1996), Nr.280, S.213-218
ISSN: 0042-5281
International Symposium on Trends and New Applications in Thin Films (TATF) <5, 1996, Colmar>
Fraunhofer IST ()
cubic boron nitride; CVD; ion beam deposition; PVD; sputter deposition; superhard carbon nitride; superhard materials

Cubic boron nitride (c-BN) is a superhard material with a high potential for applications in different fields. At present c-BN films are being prepared mainly by VD or PVD techniques. These techniques as well as the different methods used characterize the films will be discussed. Theoretical considerations have shown that a superhard carbon nitride phase C3N4 with mechanical properties equivalent to or even better than those of diamond can exist. In recent years there were many attempts to prepare carbon nitride coatings by PVD or CVD techniques. An essential problem is the incorporation of sufficiently high concentrations of nitrogen in the films. A clear evidence of crystalline Beta-C3N4 phases in C-N films is outstanding so far.