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Präzisionsmechanismen für Positioniersysteme

Precision mechanisms for positioning systems
: Dörrer, P.

Prenzel, W.D.:
Jahrbuch für Optik und Feinmechanik 1999
Berlin: Schiele und Schön, 1999
ISBN: 3-7949-0634-9
Aufsatz in Buch
Fraunhofer IOF ()
adjusting device; Drehversteller; Festkörpergelenk; flexure; flexure hinge; flexure mechanism; Führung; Gelenk; Gelenkmechanismus; guide; miniaturisiertes System; miniaturized mechanism; Piezoaktuator; piezoelectric actuator; piezoelektrischer Aktuator; Positioniersystem; positioning system; rotary stage

The paper presents monolithic flexure mechanisms in general and in detail with their advantages and disadvantages. They are produced by electro-discharge machining (EDM), mostly wire-EDM. The fundamental possibilities for calculation are given for leaf spring type mechanisms and flexures with semicircular notch hinges. The paper contains different design examples of flexure mechanisms in connection with piezoactuators, especially for the generation of rotary motions and clamp motions. Additionally it offers the design of two positioning systems for precise rotary motion. These positioning systems consist mainly of such flexure mechanisms and piezoelectric actuators. Graphics and photos illustrate their structure. The concluding diagram shows what a high angular resolution (0.025 seconds of arc) could be measured for these positioning systems, because of their structure with piezoelectric actuators in connection with flexure mechanisms. It confirms the suitability of flexure mechanisms for precise motion transmission systems.