Options
1991
Conference Paper
Titel
Polycrystalline diamond films for optical applications
Alternative
Polykristalline Diamantschichten für optische Anwendungen
Abstract
The applicability of CVD diamond films in optics is investigated. Emphasis is put on the role of the surface roughness as the most critical parameter influencing the optical quality of polycrystalline diamond films. In particular we report on the preparation of optically smooth, thin diamond films, on the in situ analysis of the optical quality, on the coating of large area substrates, and on the growth of thick, free-standing diamond wafers with flat surfaces.
Author(s)
Language
English