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Plasma-activated high rate EB deposition of metals and oxides onto strip steel
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1995
Conference Paper
Titel
Plasma-activated high rate EB deposition of metals and oxides onto strip steel
Author(s)
Schiller, S.
Goedicke, K.
Zywitzki, O.
Hötzsch, G.
Hauptwerk
Society of Vacuum Coaters. 38th Annual Technical Conference 1995. Proceedings
Konferenz
Society of Vacuum Coaters (Annual Technical Conference) 1995
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP