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Piezoresistive pressure sensors representing the 2nd generation avoid the physical limits based on conventional designs

: Sandmaier, H.

Reichl, H.:
Micro-System Technologies '90. 1st International Conference on Micro, Electro, Opto, Mechanic Systems and Components
Berlin: Springer, 1990
ISBN: 0-387-53025-8
ISBN: 3-540-53025-8
Micro System Technologies <1990, Berlin>
Fraunhofer IFT; 2000 dem IZM eingegliedert
based diaphragm; nonlinearity; piezoresistive effect; pressure sensor

A novel design of piezoresistive, low-pressure sensors is presented. This design exhibits a number of advantages compared to the conventional. The main objective of this development was realizing a sensor with high sensitivity, high pressure overload, and low nonlinearity. This paper describes the theory for the design of the piezoresistive low pressure sensor. Through the application of a square diaphragm bossed in the center, a piezoresistive low pressure sensor for the pressure range of plus minus 10 kPa could be realized, exhibiting excellent sensitivity and low nonlinearity of 35 mV/V F. S. O. and 0,05 % respectively.