Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Performance of hydrogen-sensitive MOS capacitances with integrated on-chip signal conditioning



Sensors and Actuators. B 6 (1992), Nr.1-3, S.162-164
ISSN: 0925-4005
Eurosensors <5, 1991, Rom>
Fraunhofer IMS ()
gas sensor; gassensor; hydrogen sensor; Langzeitverhalten; long-term stability; measurement probe; Meßaufnehmer; Wasserstoff

Gas-sensitive MOS capacitors with on-chip readout electronics are investigated. The use of these capacitors in combination with switched capacitor circuitry enables a.c. operation of the device to take place. Measurements show an improved long-term stability. A comparison between the integrated sensor system and a gas-sensitive FET integrated on the same chip allows these different types of sensors to be directly compared.