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Performance assessment in ultraprecision micromachining.

Beurteilung der Fertigungsgenauigkeit bei der Ultrapräzisionsbearbeitung
: Hartel, R.; Modemann, K.; Weck, M.

CIRP Annals. Manufacturing Technology 37 (1988), Nr.1, S.499-502 : Abb.
ISSN: 0007-8506
International Institution for Production Engineering Research (General Assembly) <38, 1988, Tokyo>
Fraunhofer IPT ()
Diamantbearbeitung; Maschinennachgiebigkeitsverhalten; Oberflächeninterferometrie; Oberflächenmodulation; Ultrapräzisionsmaschine

To achieve a surface roughness in nanometer range together with high shape and dimensional accuracy the micromachining with natural diamond tools in a turning or fly-cutting process is a method of great potential. The static, dynamic and kinematic behavior of ultraprecision machines limits the achievable accuracy. New tasting equipments using laser measurement technique to describe the dynamic behavior are presented. The micromachined surfaces are analysed by optical interferometry. Syntheticly generated interferograms of the perfectly shape are being compared to those taken of the real workpiece. Deviations between both patterns allow conclusions concerning machine tool performance as well as process strategy. (IPT)