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Patterning of thin HTSC films - evaluation of lithography and dry etching
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1992
Conference Paper
Titel
Patterning of thin HTSC films - evaluation of lithography and dry etching
Author(s)
Pilz, W.
Grändorff, K.
Stoll, H.-P.
Janes, J.
Hauptwerk
Progress in high-temperature superconducting transistors and other devices II
Konferenz
Conference on Progress in High-Temperature Superconducting Transistors and Other Devices 1991
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT