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1993
Conference Paper
Titel
Partikelmessung in Luft und Abnahmemessungen von Reinräumen
Abstract
Cleanromms are used in a wide range of applications. Areas of cleanrooms are from LF-boxes up to a few thousands of qm. All the cleanrooms have to be certified after construction and during their operation. In this paper the certification procedure like VDI-2083-part 3 is discussed.