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Optimization of contacts for CMOS
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1986
Conference Paper
Titel
Optimization of contacts for CMOS
Author(s)
Vogt, H.
Gruber, V.
Zimmer, G.
Hauptwerk
ESSDERC '86. 16th European Solid State Device Research Conference. Proceedings
Konferenz
European Solid State Device Research Conference 1986
Language
English
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Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS