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Optical, structural and mechanical properties of lanthanide trifluoride thin film materials for use in the DUV-spectral region

 

Optical Society of America -OSA-, Washington/D.C.:
OSA Conference on Optical Interference Coatings 1998
Washington, DC: OSA, 1998 (OSA Technical digest series 1998,9)
ISBN: 1-55752-521-8
S.116-118
Conference on Optical Interference Coatings <1998, Tucson/Ariz.>
Englisch
Konferenzbeitrag
Fraunhofer IOF ()
coating; deep ultra violet; fluorides; optical property

Abstract
Optical, structural and mechanical properties of evapored films of NdF3, LaF3, GdF3 and of different dielectric multilayer coatings for DUV-eximer laser applications have been studied.

: http://publica.fraunhofer.de/dokumente/PX-27372.html