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Optical scattering and surface microstructure of thin films for laser application

: Duparre, A.; Kiesel, A.; Gliech, S.

Review of laser engineering = Reza-kenkyu 24 (1996), Nr.2, S.220-228
ISSN: 0387-0200
Fraunhofer IOF ()
atomic force microscopy; dünne Schicht; Lichtstreuung; light scattering; Mikrostruktur; Oberflächenrauheit; Rasterkraftmikroskopie; surface roughness; thin-film microstructure

Experimental studies are described of the problem of scattering and roughness modification after deposition of optical thin films as used for application in laser components. BK7 substrates with different surface finish have been coated with MgF2, LaF3, SiO2 and Nb205 films as representatives of low index columnar structured and structureless films, respectively. Total integrated scattering (TIS) and angle resolved scattering (ARS) measurements at 632.8 nm and 325 nm as well as atomic force microscopy (AFM) investigations demonstrate that coating can result not only in roughness and scattering enhancement but also in ist reduction.