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1988
Conference Paper
Titel
3-D project and current statics of 3-D technology in West Germany
Abstract
Due to their considerable importance for the future course of microelectronics and system technologies, three-dimensional multi-functional integrated circuits shall be developed within the framework of the 3-D Project. To this end leading scientists engaged in R and D from various German enterprises in the semiconductor industry and scientific institutes participate in this joint project in order to acquire the necessary know-how and to carry out the respective tasks in research and development in close cooperation. This paper provides information on the targets and the structure of the 3-D Project. Furthermore, it comprises a survey of the tasks planned as well as of the results accomplished up to the present. (IFT)
Konferenz
Language
English