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1993
Conference Paper
Titel
On-wafer single contact S-parameter measurements to 75 GHz - calibration procedure and measurement system
Alternative
On-Wafer S-Parametermessungen bis 75 GHz mit einmaligem Kontaktieren des DUTs - Kalibrier-Routine und Meßsystem
Abstract
A measurement system based on coaxial wafer probes has been developed that allows, for the first time, on-wafer measurement of s-parameters over the full frequency range from 45 MHz to 75 GHz (microwave to millimeter wave) with a single probe contact. In addition, it was found that the non-ideal behavior of the on-wafer calibration standards had a significant influence on the measured accuracy at millimeter wave frequencies. The accuracy of the on-wafer s-parameter measurements to 75 GHz, obtained in this measurement system, was improved by the development of a calibration enhancement procedure. This calibration enhancement procedure allows the non-ideal behavior of the on-wafer calibration standards to be accounted for directly in the (HP8510) Network Analyzer 12 term two-port error correction model.
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