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2-D effects during isolation process - experiments and simulation

: Huber, V.; Seidl, A.

Soncini, G.:
Solid State Devices. Proceedings of the 17. European Solid State Device Research Conference, ESSDERC '87 : Bologna, Italy, 14-17 September 1987
Amsterdam: North-Holland, 1988
ISBN: 0-444-70477-9
European Solid State Device Research Conference (ESSDERC) <17, 1987, Bologna>
Fraunhofer IFT; 2000 dem IZM eingegliedert
isolation; oxidation

SEMIROX bird's beaks were processed for different sets of parameters including variation of the buffer oxide thickness, nitride thickness and temperature. A numerical simulator is used to discuss two-dimensional stress- and diffusion effects. (IFT)