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Numerical modelling of RF excited CO2 laser discharges

: Wester, R.; Seiwert, S.


Journal of Physics. D. Applied Physics 24 (1991), Nr.8, S.1371-1375
ISSN: 0022-3727
Fraunhofer ILT ()
density-voltage; dielectric; electrode; ion; neutral gas; power; velocity

Current density-voltage (j-U) characteristics and vibrational excitation efficiencies of RF excited C0sub2 laser discharges have been calculated in the frame of a self-consistent numerical discharge model. The model includes the continuity equations for electrons and positive ions, Poisson's equation and the energy balance equation for the neutral gas. The results are compared with experiments. The slope of the j-U characteristic decreases with increasing frequency and with increasing pressure. The vibrational excitation efficiency increases with increasing frequency and decreases with increasing RF power and decreasing pressure.