Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Novel potentiometric silicon sensor for medical devices

 

Foundation for Sensor and Actuator Technology, Stockholm:
8th International Conference on Solid-State Sensors and Actuators 1995 and Eurosensors IX. Digest of technical papers. Vol. 2. Sessions A7-D13. Papers No.232-496
Stockholm: Congrex, 1995
ISBN: 91-630-3473-5
S.959-962
International Conference on Solid-State Sensors and Actuators <8, 1995, Stockholm>
Eurosensors <9, 1995, Stockholm>
Englisch
Konferenzbeitrag
Fraunhofer ISIT ()
biomedical equipment; biosensors; chemical sensors; micromachining; microsensors; potentiometers; silicon

Abstract
The fabrication process for a potentiometric silicon sensor will be described. The sensor was fabricated in bulk silicon micromachining using a double side wafer process. A small channel was etched anisotropically in (100) silicon. The back side groove was metallised. To form an ion-selective electrode an ion-selective membrane was deposited in the channel. Additionally, a novel type of Ag/AgCl/Ag reference electrode was integrated on the front side of the chip. The small size of the sensor allows the application in catheter systems.

: http://publica.fraunhofer.de/dokumente/PX-26589.html