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A novel fully integrated sensor for remote measurement of pressure and temperature
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1998
Book Article
Titel
A novel fully integrated sensor for remote measurement of pressure and temperature
Author(s)
Amelung, J.
Lerch, R.G.
Volkwein, B.
Bögel, G. vom
Hauptwerk
Fraunhofer-Institut fĂĽr Mikroelektronische Schaltungen und Systeme. Annual report 1997
Language
English
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Fraunhofer-Institut fĂĽr Mikroelektronische Schaltungen und Systeme IMS