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Non-contact testing of optical surfaces by multiple-wavelength light scattering measurement

: Duparre, A.; Gliech, S.

Shladov, I. ; Association of Engineers and Architects in Israel:
10th Meeting on Optical Engineering in Israel 1997. Part 1
Bellingham, Wash.: SPIE, 1997 (SPIE Proceedings Series 3110)
ISBN: 0-8194-2532-X
Meeting on Optical Engineering in Israel <10, 1997, Jerusalem>
Fraunhofer IOF ()
defect detection; Defekterkennung; Lichtstreuung; light scattering; Oberflächenrauheit; Qualitätskontrolle; quality control; surface roughness

An instrument is described which enables the detection of backscattered light within a wide spectral region. The apparatus is based on a Coblentz sphere and is equipped with light sources from the UV to IR spectral region (248 nm - 10.6 mu m).Results are reported of measurements on samples with different surface qualities such as supersmooth Si-wafers with sub-Angström surface roughness, glass substrates, thin film optical components and machined surfaces. The set-up complies with a corresponding ISO project.