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A new SO2 sensor system with SAW and IDC elements

: Leidl, A.; Hartinger, R.; Roth, M.; Endres, H.-E.

Foundation for Sensor and Actuator Technology, Stockholm:
8th International Conference on Solid-State Sensors and Actuators 1995 and Eurosensors IX. Digest of technical papers. Vol. 2. Sessions A7-D13. Papers No.232-496
Stockholm: Congrex, 1995
ISBN: 91-630-3473-5
International Conference on Solid-state sensors and actuators <8, 1995, Stockholm>
Fraunhofer IFT; 2000 dem IZM eingegliedert
gas sensor; heteropolysiloxane; humidity; IDC; interdigital capacitor; micro system technology; SAW; signal processing system; SO2; surface acoustic wave

Applying new transducer principles on well known indicator materials improves the performance of the whole system, especially the humidity interference. A well known S02-sensitive material (heteropolysiloxane, NND)/PTMS) was tested with a SAW (Surface Acoustic Wave, STW Surface Transverse Wave Mode) transducer and an IDC (Interdigital Capacitor) device. Due to a different relative sensitivity of the coated ]DC and SAW devices to S02 and humidity, we were able to reduce the overall cross-sensitivity of the system to humidity significantly. The combination of these two different types of transducers, in case of need extended with other transducers, increases the performance of the sensor system.