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New results of adhesion technology for assembly of microoptical components

: Eberhardt, R.; Tittelbach, G.; Guyenot, V.

Reichl, H.; Heuberger, A. ; MESAGO Messe Frankfurt GmbH, Stuttgart; Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin:
Micro System Technologies '96 : 5th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, September 17 - 19, 1996
Berlin: VDE-Verlag, 1996
ISBN: 3-8007-2200-3
International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components <5, 1996, Potsdam>
Fraunhofer IOF ()
adhesive; adhesive bonding; automatic joining process; dispensation; grippers; handling; micro assembly; optical component; robotic system

By the increasing applications of microoptical components in microsystems it is fundamental prerequisite for the manufacturing in small and medium-sized business to develop automatic assembly processes. The manufacturing of a beam shaping optics that consists of two or more microoptical components is a good example for such an assembly process. However, the demands of the high positioning accuracy can not be reached in a manually alignment process. It is also not the way to achieve a high production output with low cost. The positioning accuracy required in the assembly steps is 0,5-5mu m, depending on the position of the optical component in the optical scheme. The basis of the assembly system forms a robot. It is a flexible automated system with a better than 10mu m repeatability. By the help of this robot it is possible to dispense adhesives, to handle, to grip, and to join the components with very small position deviations (smaller than 2 mu m). The development of special grippers is prerequisite for the handling of microoptical components. That's why vacuum grippers and piezo-grippers have been designed to shapes of the cylindrical and rectangular samples. The used joining technique is adhesive bonding. It will be shown that it is possible to applicate small volume of adhesive (nl-range) onto the surface of the microoptical component.