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A new micropump principle of the reciprocating type using pyramidic micro flowchannels as passive valves

: Gerlach, T.; Schuenemann, M.; Wurmus, H.


Journal of micromechanics and microengineering 5 (1995), Nr.2, S.199-201
ISSN: 0960-1317
ISSN: 1361-6439
Fraunhofer IPA ()

The working principle of a dynamic micropump is presented and its basic parameters are discussed. the dynamic micropump has a very simple and cheap structure consisting of a pump chamber, an oscillating membrane and two truncated pyramid shaped microchannels produced by anisotropic etching of silicon. The latter show a direction-dependent behaviour of their flow resistances, for which reason they provide as so-called dynamic passive valves, a partial rectifying of an alternating flux. The simple mechanical system of the micropump enables high working frequencies between 100 Hz and 10 kHz; the zero-load pump rate is equal to or higher than 250 ul min-1, being up to one order of magnitude more than the micropumps so far developed can provide. The pump parameters can be chosen in a wide range by simply changing the size of the dynamic valve channels.