English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
A new generation of negative tone photoresists: ma-N 400
Details
Full
Export
Statistics
Options
1997
Journal Article
Titel
A new generation of negative tone photoresists: ma-N 400
Author(s)
Grützner, G.
Fehlberg, S.
Voigt, A.
Löchel, B.
Rothe, M.
Zeitschrift
Solid state technology
Language
English
google-scholar
View Details
Fraunhofer-Institut für Siliziumtechnologie ISIT