Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

A new driving principle for micromechanical torsional actuators

 
: Schenk, H.; Dürr, P.; Kunze, D.; Kück, H.

Lee, A.; Forster, F.; Lee, Y.C.; Goodson, K.; Keynton, R.; Lin, L. ; American Society of Mechanical Engineers -ASME-, Bioengineering Division; American Society of Mechanical Engineers -ASME-, Electrical and Electronic Packaging Division; American Society of Mechanical Engineers -ASME-, Fluids Engineering Division; American Society of Mechanical Engineers -ASME-, Heat Transfer Division:
Micro Electro Mechanical Systems 1999
New York, NY: The American Society of Mechanical Engineers, 1999
ISBN: 0-7918-1638-9
S.333-338
International Mechanical Engineering Congress and Exposition <1999, Nashville/Tenn.>
Englisch
Konferenzbeitrag
Fraunhofer IMS, Außenstelle Dresden ( IPMS) ()
Aktuator; Elektrostatischer Antrieb; Mikromechanik; Mikrosystem; Scannerspiegel

Abstract
An electrostatic driving principle for micromechanical torsional actuators is presented which allows to excite mechanical oscillations with large deflection angles at low driving voltages. This is achieved by a special electrode configuration which enables the usage of small electrode gaps. The functionality is demonstrated by various ID-scanner chips which are fabricated in a CMOS-compatible process. When the excitation is synchronized with the oscillation a maximum deflection angle is obtained. For this case a theoretical description of the characteristic curve is given and compared to experimental results. Furthermore, FEM calculations on the deflection dependence of the capacitance are presented.

: http://publica.fraunhofer.de/dokumente/PX-26139.html