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Monte Carlo ion implantation and COMPOSITE

Monte Carlo Ionenimplantation und COMPOSITE
: Lorenz, J.; Ryssel, H.; Barthel, A.

ESSDERC '87. 17th European Solid State Device Research Conference. Proceedings
Bologna: Verlag Technoprint, 1987
European Solid State Device Research Conference (ESSDERC) <17, 1987, Bologna>
Fraunhofer IIS B ( IISB) ()
Ionenimplantation; Monte Carlo methods; Prozeßsimulation

Analytical methods for the description of ion implantation show good agreement with experiment and Monte-Carlo simulations in most cases. Problems arise with special geometrics such as trenches. To be able to simulate implantation and diffusion in such cases, a Monte-Carlo interface has been added to the process simulation program COMPOSITE. (AIS-B)