Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Monolithic infrared sensor system with programmable readout electronics


Pfleiderer, H.-J.:
ESSCIRC '94. 20th European Solid State Circuits Conference. Proceedings
Gif-sur-Yvette: Editions Frontieres, 1994
ISBN: 2-86332-160-9
European Solid State Circuits Conference <20, 1994, Ulm>
Fraunhofer IMS, Außenstelle Dresden ( IPMS) ()
Infrarotdetektor; integrierte Halbleiterschaltung; Meßaufnehmer; Pyrometrie; Strahlungsmessung

We report on a fully CMOS compatible infrared sensor with integrated signal amplification electronics. The IR sensor consists of 60 thermocouples of p+ doped silicon and n-doped polysilicon electrically connected in series. Local SOI and an additional step of anisotropic backside etching have been used to achieve a good thermal isolation between the hot and the cold junctions of the sensor. The signal amplification electronics has been realized using fully differential switched capacitor design techniques manufactured in a 2mym n-well CMOS-technology.