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Modular CAD environment for contactless test systems

: Fritz, J.; Lackmann, R.


Microelectronic engineering 12 (1990), Nr.1-4, S.389-395
ISSN: 0167-9317
European Conference on Electron and Optical Beam Testing of Integrated Circuits <2, 1989, Duisburg>
Fraunhofer IMS ()
CAD-CAT; hipare; laser beamtest coupling

We describe a modular software environment for a non-destructive automated digital test system using the laser probe and coupled via a hardware link to the CAD data base of a parameter extractor. Due to the modularity of the developed software adaptation and transformation to other systems is easy. Combined with the electron beam tester it offers the possibility of automated contactless testing using the electron and the optical probe and provides an effective environment to shorten up failure analysis.