Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

A modeling approach to include mechanical microsystem components into the system simulation



European Design Automation Association -EDAA-; IEEE Computer Society, Technical Committee on Test Technology; Electronic Design Automation Consortium -EDAC-:
Design, automation and test in Europe 1998. Proceedings
Los Alamitos: IEEE Computer Society, 1998
ISBN: 0-8186-8359-7
ISBN: 0-8186-8361-9
Design, Automation and Test in Europe Conference (DATE) <1998, Paris>
Fraunhofer IIS A ( IIS) ()
microsystem; mechanical components; modeling; simulation

For MEMS devices modern technologies are used to integrate very complex components and subsystems closely together. Due to mixed-domain problems as well as the occuring interactions between the closely coupled system components the design is a sophisticated process. The interactions between the MEMS components have to be analysed by system simulation already in an early design stage. In this paper a modeling approach is introduced that enables the incorporation of mechanical microsystem components into the system simulation using network and system simulators like SABER. The approach is based on multi-terminal models of basic mechanical elements and their composition to more complex microsystems. First results for a micromechanical resonator are presented.