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Model transformation for coupled electro-mechanical simulation in an electronics simulator

: Pelz, G.; Bielefeld, J.; Zimmer, G.


Microsystem Technologies 1 (1995), S.173-177
ISSN: 0946-7076
Fraunhofer IMS ()
Druckmessung; Meßaufnehmer; Mikrosystemtechnik; Systemsimulation

The simulatin of microsystems requires to handle the close coupling between electronical and mechanical components. This interaction between electronics and mechanics often is an inherent and essential property of such systems. Therefore, dynamical electromechanical simulations are indespensable for the eyamination of the system behavior. For this purpose, we developed a method which enables dynamical electro-mechanical simulations within an electronical circuit simulator.