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Miniaturized mechanism for precise rotary motion

: Dörrer, P.

Kunzmann, H.:
Progress in Precision Engineering and Nanotechnology
Braunschweig: Wirtschaftsverlag NW, 1997
ISBN: 3-9801433-9-2
International Precision Engineering Seminar (IPES) <9, 1997, Braunschweig>
International Conference on Ultraprecision in Manufacturing Engineering (UMES) <4, 1997, Braunschweig>
Fraunhofer IOF ()
adjusting device; Drehversteller; miniaturisiertes System; miniaturized mechanism; piezoelectric actuator; piezoelektrischer Aktuator; Positioniergenauigkeit; Positioniersystem; positioning accuracy; positioning system; rotary stage

This paper presents two systems for generation of precise rotary motion, one of them is a miniaturized instrument with a total volume lower than 3 cm3. The first instrument is actually realized as a prototype and the measurement results show the parameters for precise rotary motion. The angular resolution of this system is better than 0.026 seconds of arc = 0. 1 2 mu rad. The second, miniaturized instrument, is still in development. Because the rotary motion is generated in a similar manner, with piezoelectric actuators and transformed by elastic hinges without clearance, the angular resolution will practically not be limited by the mechanism, but by the voltage control for piezoelectric actuator. An angular resolution of about 0.2 seconds of arc is expected for the miniaturized instrument.