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A miniaturized magnetic field sensor system consisting of a planar fluxgate sensor and a CMOS readout circuitry


Foundation for Sensor and Actuator Technology, Stockholm:
8th International Conference on Solid-State Sensors and Actuators 1995 and Eurosensors IX. Digest of technical papers. Vol. 2. Sessions A7-D13. Papers No.232-496
Stockholm: Congrex, 1995
ISBN: 91-630-3473-5
International Conference on Solid-state sensors and actuators <8, 1995, Stockholm>
Fraunhofer IMS, Außenstelle Dresden ( IPMS) ()
ASIC; CMOS-Schaltung; Fluxgate-Sensor; Kundenschaltung; Magnetfeldmessung; Sensorsystem

We report on a miniaturized magnetic field sensor system consisting of a fluxgate sensor fabricated in CMOS-compatible planar technology and a CMOS-ASIC for sensor supply, readout and signal processing using second harmonic principle with a feedback loop for zero field operation. The system exhibits a sensitivity of (9.2ñ0.1) mV/µT for a magnetic field range of ñ90µT and a temperature range of 0øC to 70øC. The 3 dB bandwith is 300 Hz and a noise value of 30 nT/(Hz)1/2 was estimated. Using 5V supply voltage a power consumption of 160mW for the system was measured.