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Mikromechanisches Element

Micromechanical element
: Gesemann, H.J.; Schoenecker, A.

Frontpage ()

DE 1994-4444070 A: 19941210
DE 1994-4444070 A: 19941210
DE 4444070 C1: 19960808
Patent, Elektronische Publikation
Fraunhofer IKTS ()

The invention relates to the fields of micromechanics and microelectronics and refers to a micromechanical element. The invention is based on the technical problem of specifying a micromechanical element which can be used as a hybrid and can alter precisely the adjustment range independent of its dimension tolerances without the need for special complex measures. The problem is solved by a micromechanical element in which a piezoelectric and/or a ferroelectric component are/is affixed to the underside of a silicon tongue and are/is controllable by an electric field, whereby the underside of the silicon tongue is the opposite side of the side of the silicon tongue bearing the functional element.