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Mikromechanischer Beschleunigungssensor

Micromechanical acceleration sensor
 
: Kozlowski, F.; Steiner, P.; Lang, W.

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Frontpage ()

DE 1994-4431327 A: 19940902
DE 1994-4431327 A: 19940902
DE 4431327 C2: 19990610
G01P0015
Deutsch
Patent, Elektronische Publikation
Fraunhofer IZM ()

Abstract
A micromechanical acceleration sensor comprises a basic element and a seismic mass element suspended in a spring, the relative position between the said sensor and the basic element being detected by a capacitive detector. To prevent the movable structural parts of the acceleration sensor from adhering to the basic element without having to accept any impairment in measuring sensitivity, the capacitive detector is designed in the form of an interdigital capacitor whose capacitor elements are arranged in a single plane alternately and adjacently, perpendicular in the direction of the acceleration to be measured.

: http://publica.fraunhofer.de/dokumente/PX-24113.html