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Cantilever chip for atomic force microscopy - uses plasma deposition process for direct application of diamond point to end of cantilever spring blade.
 
: Schiffmann, K.I.; Jiang, X.; Luethje, H.

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Frontpage ()

DE 1996-19622701 A: 19960605
DE 1996-19622701 A: 19960605
DE 19622701 A1: 19971218
H01J0037
Deutsch
Patent, Elektronische Publikation
Fraunhofer IST ()

Abstract
The cantilever chip has a cantilever spring blade provided at its end with a diamond point, which is directly applied to the spring blade via a plasma deposition process. The spring blade may be provided with a diamond layer for modifying its mechanical characteristics. The diamond point and/or the cantilever spring blade may be doped for modifying its electrical characteristics, to allow the simultaneous measurement of the topography and the electrical surface characteristics. USE - For measuring localised surface topology and material characteristics. ADVANTAGE - High quality diamond point when cantilever chips are mass produced.

: http://publica.fraunhofer.de/dokumente/PX-24043.html