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1992
Conference Paper
Titel
Micro optic components on silicon platforms with etched micromechanical adjusting elements.
Alternative
Mikrooptische Bauelemente auf Silizium-Plattformen mit geätzten mikromechanischen Justierelementen
Abstract
A silicon platform with etched adjusting elements is used to fabricate micro optic devices. We report results on mask design and the etching process using KOH. The mounting of the optical parts is very simple. A beam splitter was fabricated for demonstration of the technology.
Author(s)
Language
English