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1989
Conference Paper
Titel
Micro-Non-Destructive Testing for structure and defects, especially in new materials
Abstract
Micro-Non-Destructive (Micro-NDT) comprises several objectives. Firstly, detection of small defects in components whose presence might cause failure of the components. Secondly, non-destructive testing of small components, for example, micromechanical devices. It also comprises the evaluation of material parameters pertaining to proper functioning of components. These can be achieved by exploiting the interaction behavior of electromagnetic, X-ray, particle, and ultrasonic radiation with matter.
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