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A micro mechanical system for liquid dosage and nebulization

: Kluge, S.; Hermes, T.; Paneva, R.; Temmel, G.; Woias, P.

Reichl, H.; Heuberger, A. ; MESAGO Messe Frankfurt GmbH, Stuttgart; Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin:
Micro System Technologies '96 : 5th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, September 17 - 19, 1996
Berlin: VDE-Verlag, 1996
ISBN: 3-8007-2200-3
International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components <5, 1996, Potsdam>
Fraunhofer IFT; 2000 dem IZM eingegliedert
liquid dosing system; micro pump; microsystem; nebulization

In several applications it is required to nebulize small amounts of liquid with a special rate. In this paper, a micro machined compact system for liquid dosage and nebulization is presented. The system combines two elements produced by silicon micro machining: a micro diaphragm pump for precise dosage and a micro nebulizer for fog generation. It is characterized by a low power consumption (about 0.25 W) and a low weight (7.5 g without housing). Measuring curves of the components and the whole system are discussed. The described micro mechanical system for liquid dosage and nebulization is a part of a research project for the development of a compact system to control and monitor the anaesthetic process. During the surgical treatment a precise supply of different anaesthetics is requested. For liquid anaesthetics the required amounts are between 4 mu l/min and 400 mu l/min, depending on the state of the narcosis and the anaesthetic. The concept of the discussed system is based on the u sage of a micro pump (7x7x2 mm3) for the liquid dosage and a micro nebulizer (13x13 mm2) for the Generation of drops with diameters of several m um (d10=17 mu m). The drops vaporize immediately after generation and the vapour is carried into the lungs by the breathing gas.