English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Micro coils fabricated by UV depth lithography and galvanoplating
Details
Full
Export
Statistics
Options
1996
Journal Article
Titel
Micro coils fabricated by UV depth lithography and galvanoplating
Author(s)
Löchel, B.
Maciossek, A.
Rothe, M.
Windbracke, W.
Zeitschrift
Sensors and Actuators. A
DOI
10.1016/S0924-4247(97)80034-9
Language
English
google-scholar
View Details
Fraunhofer-Institut fĂĽr Siliziumtechnologie ISIT