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Methods for the determination of the static accuracy and linearity of electron-beam test systems

: Lackmann, Rainer; Weichert, Gerhard


Microelectronic engineering 16 (1992), Nr.1-4, S.233-237
ISSN: 0167-9317
European Conference on Electron and Optical Beam Testing of Integrated Circuits <3, 1991, Como>
Zeitschriftenaufsatz, Konferenzbeitrag
Fraunhofer IMS ()

In conjunction with the development of a new test chip for qualification and characterisation of electron-beam testers by the "ITG Fachgruppe 5.6 Kontaktloses Testen von elektronischen Bauelementen" (Head: Prof. Dr.-Ing. E. Kubalek) suitable test methods have been investigated. In this paper several methods for determining the static accuracy and linearity are presented. The recommended procedure can be carried out without great effort and gives easily interpretable results.