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Methods for the determination of the static accuracy and linearity of electron-beam test systems

 
: Lackmann, R.; Weichert, G.

European Conference on Electron and Optical Beam Testing of Integrated Circuits
1991
S.201-205
European Conference on Electron and Optical Beam Testing of Integrated Circuits <3, 1991, Como>
Englisch
Konferenzbeitrag
Fraunhofer IMS ()
Elektronenstrahlmeßtechnik; Linearitätsfehler; statischer Meßfehler

Abstract
In conjunction with the development of a new test chip for qualification and characterisation of electron-beam testers by the "ITG Fachgruppe Kontaktloses Testen von elektronischen Bauelementen" (Head: Prof. Dr.-Ing. E. Kubalek) suitable test methods have been investigated. In this paper several methods for determining the static accuracy and linearity are presented. The recommended procedure can be carried out without great effort and gives easily interpretable results.

: http://publica.fraunhofer.de/dokumente/PX-23845.html