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Metallization of submicron microwave bipolar transistors by electroplating
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1994
Journal Article
Titel
Metallization of submicron microwave bipolar transistors by electroplating
Author(s)
Webster, M.N.
Tuinhout, A.
Verbruggen, A.H.
Romijn, J.
Drift, E. van der
Löchel, B.
Jos, H.F.F.
Moors, P.M.A.
Zeitschrift
Microelectronic engineering
DOI
10.1016/0167-9317(94)90191-0
Language
English
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Fraunhofer-Institut fĂĽr Siliziumtechnologie ISIT