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Messung von Mikrostrukturen in einem großen Skalenbereich durch Kombination von Weißlichtinterferometrie und Rasterkraftmikroskopie

: Recknagel, R.-J.; Feigl, T.; Duparre, A.; Notni, G.

FH für Technik und Wirtschaft Mittweida:
IWKM '98. 13. Internationale Wissenschaftliche Konferenz Mittweida
Mittweida, 1998 (Scientific reports. Journal of the Mittweida University of Technology and Economics 1998)
S.199-205 (Nr.5)
FH Mittweida (Internationale wissenschaftliche Konferenz) <13, 1998, Mittweida>
Fraunhofer IOF ()
atomic force microscopy; power spectral density; surface roughness; white light interferometry

A variety of technical applications require surface roughness to be measured and characterised over wide range of scale. In order to meet these requirements it is inevitable to combine different measurement techniques by using an assembled PSD. As an example the white light interferometry (WLI) is compared to the atomic force microscopy (AFM) by measuring a binary grating. The results show a good correspondence of the profiles and power spectral densities (PSD). Furthermore, rough surfaces are measured by WLI and AFM and combined by means of the PSD in a wide range of scale covering up to 5 orders of magnitude. It will be shown, that in some cases only the combined PSD will give the right results to describe the surface by a model PSD. It turns out that either the fractal or the ABC-model are very well suited.