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Magnetron activated deposition MAD process
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1995
Journal Article
Titel
Magnetron activated deposition MAD process
Author(s)
Reschke, J.
Goedicke, K.
Schiller, S.
Zeitschrift
Surface and coatings technology
Konferenz
International Conference on Metallurgical Coatings and Thin films 1995
DOI
10.1016/0257-8972(95)02625-8
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP