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Luminescent porous silicon investigated by accelerator analytics

 
: Steiner, P.; Weidhaas, J.; Lang, W.

Materials Research Society -MRS-:
Microcrystalline Semiconductors - Material Science and Devices
Pittsburgh/Pa., 1993 (Materials Research Society symposia proceedings 283)
ISBN: 1-55899-178-6
S.531-536
Materials Research Society (Fall Meeting) <1992, Boston/Mass.>
Englisch
Konferenzbeitrag
Fraunhofer IFT; 2000 dem IZM eingegliedert
Beschleunigeranalytik; Lumineszenz; pröses Silizium

Abstract
Electroluminescent nanoporous silicon is investigated by accelerator techniques. Rutherford Backscattering Spectroscopy (RBS) and Nuclear Reaction Analysis (NRA) are used to measure the oxygen content. The stoichiometry is Sisub1Osub1.8 in the top layer and Sisub1Osub0.8 in 6 mym depth. Channeling experiments show that only very weak channels are present.

: http://publica.fraunhofer.de/dokumente/PX-22545.html