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Low temperature silicon wafer bonding
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1992
Journal Article
Titel
Low temperature silicon wafer bonding
Author(s)
Benecke, W.
Quenzer, H.J.
Zeitschrift
Sensors and Actuators. A
Konferenz
Eurosensors 1991
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT