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Low-sintering PZT-ceramics for advanced actuators

: Schoenecker, A.; Gesemann, H.J.; Seffner, L.

Kulwicki, B.M.; Amin, A.; Safari, A. ; Institute of Electrical and Electronics Engineers -IEEE-:
10th IEEE International Symposium on Applications of Ferroelectrics 1996. Proceedings
Piscataway, NJ: IEEE, 1996
ISBN: 0-7803-3355-1
ISBN: 0-7803-3356-X
ISBN: 0-7803-3357-8
International Symposium on Applications of Ferroelectrics <10, 1996, East Brunswick/NJ>
Fraunhofer IKTS ()

Much effort has been made to reduce sintering temperature Ts of PZT powders, driven by the demands of multilayer actuator fabrication.Suppression of PbO-evaporation and usability of cost effective electrode materials have been the main reasons.We succeeded in reducing Ts of soft-PZT down to 780 degree C by creating liquid phases during sintering.Consequently, the fabrication of components with high surface to volume ratio became possible.For example, dense PZT thick films (thickness 50...150 mu m) on alumina, showing high remanent polarization (20 mu C/cm2) and high mechanical strength were prepared.In order to raise operation frequency and temperature the development of low-sintering hard-PZT has been investigated.This task turned out to be more difficult, because most eutectic additives tend to reduce Curie temperature Tc likewise.Nevertheless, a special modification has been found giving a hard-PZT (i.e.Tc equals 350 degree C) that densities already at Ts equals 1050 degree C/2 h. T he paper reports on our compositional development of low-sintering PZT-ceramics together with its impact on the design and performance of advanced actuators.