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Low-pressure sensor with bossed diaphragm

: Sandmaier, H.


Mechatronics 1 (1991), Nr.4, S.393-401
ISSN: 0957-4158
Fraunhofer IFT; 2000 dem IZM eingegliedert
bossed diaphragm; compensation; low pressure; nonlinearity; piezoresistive effect

A novel design of piezoresistive, low-pressure sensors is presented. This design exhibits a number of advantages compared to conventional ones. The main objective of this development was realizing a sensor with high sensitivity, high pressure overload. and low non-linearity. This paper describes the theory of designing a piezoresistive low-pressure sensor. Through the application of a square diaphragm bossed in the center, a piezoresistive low-pressure sensor for the pressure range of plusminus 10 kPa could be realized, exhibiting excellent sensitivity and low non-linearity of 35 mV/V F.S.O. and less than/plusminus0.05/ %, respectively.